Tantalum(V) ethoxide (Cas: 6074-84-6) is a metalorganic compound with formula Ta2(OC2H5)10, often abbreviated as Ta2(OEt)10. It is a colorless solid that dissolves in some organic solvents but hydrolyzes readily. It is used in semiconductor coatings, oxide films, and thin film optical applications. The Tantalum ethoxide precursor is used to deposit ultra-thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition (ALD) and chemical vapor deposition (CVD) methods. Learn more about City Chemical LLC.
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