Octachlorotrisilane (Cas No. 13596-23-1) is a chemical compound molecular formula: Cl8Si3. It is being recognized as a promising precursor for ALD processes that lower the thermal budget for the deposition of Silicon dioxide and Silicon nitride, which tend to be used in high volume manufacturing. Octachlorotrisilane is a corrosive, water-reactive, colorless liquid that requires extreme care when handling and transporting. Learn more about City Chemical LLC.
source https://www.citychemical.com/octachlorotrisilane.html
No comments:
Post a Comment