Hexachlorodisilane (HCDS) - CAS No: 13465-77-5 is used to grow thin films of Si, SiO2, SiC, Si3N4 by chemical vapor deposition. The advantage to using HCDS is that it can be used at low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process. Learn more about City Chemical LLC.
source https://www.citychemical.com/hexachlorodisilane.html
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